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Precursors for deposition technologies (MOCVD, ALD...)

Precursors

We offer several grades of precursors for deposition technologies (MOCVD, ALD...), up to the highest standards (Epitaxy).

DopantProduct nameAcronym
AlAluminumtrichlorideAlCl3
AlDiethylaluminumethoxideDEALO
AlDiethylaluminumhydrideDEAlH
AlDimethylaluminium i-propoxideDMAliP
AlDimethylaluminumhydrideDMAlH
AlDimethylethylaminealane-adductDMEAAl
AlTriethylaluminumTEAL
AlTritertiarybutylaluminumTTBAL
AsArsenictrichlorideAsCL3
AsTertiarybutylarsineTBAs
AsTriethoxyarsineTEOAs
AsTrimethylarsineTMAs
AsTris(dimethylamino)arsineTDMAAs
BBorazineBorazine
BTriethylboronTEB
BTriethylboron B10TEB (B10)
BTritertiarybutylboronTTBB
BTriethylboronTEB
BiTrimethylbismuthTMBi
BiTritertiarybutylbismuthTTBBi
BrCarbontrichloridebromideCCL3Br
BrCarbontetrabromideCBr4
CHexeneHexene
CPentanePentane
CdDimethylcadmiumDMCd
CdDimethylcadmium in hexaneDMCd in Hexane 10% sol.
ClTertiarybutylchlorideTBCL
CrBis-Cyclopentadienyl-chromiumCp2Cr
FeFerroceneCp2Fe
GaTriethylgalliumTEGa
GaTrimethylgalliumTMGa
GaTritertiarybutylgalliumTTBGa
GeGermaniumtetrachlorideGeCl4
GeIsobutylgermaneIBGe
GeTetramethylgermaneTMGe
HfTetrakis(dimethylamino)hafniumTDMAHf
HfTetrakis(ethylmethylamino)hafnium(IV)TEMAHf
HfTris(dimethylamino)cyclopentadienylhafniumTDMACpHf
IEthyliodideEI
IIsobutyliodideIBI
IMethyliodideMI
InCyclopentadienylindiumInCp
InDimethylaminopropyl-dimethyl-indiumDADI
InTriethylindiumTEIn
InTriisopropylindiumTIPIn
InTrimethylindiumTMIn
InTrimethylindiumTMIn
LaTris(isopropylcyclopentadienyl)lanthanumLa(iPrCp)3
MgBis(methylcyclopentadienyl)magnesiumMCp2Mg
MgBis-Cyclopentadienyl-magnesiumCp2Mg
MnBis(methylcyclopentadienyl)manganese(MCp)2Mn
MnBis-Cyclopentadienyl-manganeseCp2Mn
Mo(Ethylcyclopentadienyl)dicarbonylnitrosylmolybdenumECpDCNMo
Mo(Methylcyclopentadienyl)dicarbonylnitrosylmolybdenumMCpDCNMo
MoBis(tert-butylimido)bis(dimethylamido)molybdenumTBDMAMo
MoMolybdenumhexacarbonylMo(CO)6
NDimethylhydrazineUDMHy
NTertiarybutylhydrazineTBHy
NTriethylamineTEN
NTrisilylamineTSA
Nb(tert-Butylimino)tris(diethylamino)niobiumTBTDANb
OWater purifiedH2O
PTertiarybutylphosphineTBP
PtTrimethyl(methylcyclopentadienyl)platinum(IV)MeCpPtMe3
RuBis(ethylcyclopentadienyl)ruthenium(II)Ru(EtCp)2
SDiethylsulfideDES
SDitertiarybutylsulfidDTBS
SbAntimonytribromideSbBr3
SbTriethylantimonyTESb
SbTrimethylantimonyTMSb
SbTris(dimethylamino)antimonyTDMASb
ScTris(2,2,6,6-tetramethyl-3,5-heptanedionato)scandium(III)tetraglymeSc-MO-1
ScTris(cyclopentadienyl)scandiumCp3Sc
ScTris(isopropylecyclopentdienyl)scandium(iPCp)3Sc
ScTris(methylcyclopentadienyl)scandium(MCp)3Sc
ScTris(N,N-diethylacetamidinate)scandiumTDEacaSc
ScTris(N,N-diisopropylacetamidinate)scandiumTDiPacaSc
SeDiethylselenideDESe
SeDiisopropylselenideDiPSe
SeDimethylselenideDMSe
SiBis(diethylamino)silaneBDEASi
SiBis(ethylmethylamino)silaneBEMASi
SiBis(tertiär-butylamino)silanBTBASi
SiDitertiarybutylsilaneDTBSi
SiDitertiarybutylsilaneDTBSi
SiSiliciumtetrachlorideSiCL4
SiTetraethylorthosilicateTEOS
SiTetramethylsilaneTMSi
SiTriethoxysilaneHTEOS
SiTrimethoxypropylsilaneTMOPSi
SiTris(dimethylamino)silaneTDMASi
SnTetraethyltinTESn
SnTetramethyltinTMSn
SnTintetrachlorideSnCL4
TaPentakis(dimethylamino)tantalum(V)PDMATa
TaPentakis(ethoxy)tantalumPETa
TaTantalum(V)-ethoxideTaEtO
TeDiethyltellurideDETe
TeDiisopropyltellurideDiPTe
TeDitertiarybutyltellurideDTBTe
TeMethylallyltellurideMATe
TiTetraisopropoxytitaniumTiPOTi
TiTetrakis(dimethylamino)titanium(IV)TDMAT
TiTitaniumtetrachlorideTiCL4
TiTitaniumtetraisopropoxideTTIP
VBis-cyclopentadienyl-vanadiumCp2V
VVanadiumtetrachlorideVCl4
W(Ethylcyclopentadienyl)dicarbonylnitrosyltungstenECpDCNW
W(Methylcyclopentadienyl)dicarbonylnitrosyltungstenMCpDCNW
WBis(tert-butylimido)bis(dimethylamido)tungstenTBDMAW
WTungstenhexacarbonylW(CO)6
ZnDiethylzincDEZn
ZnDimethylzincDMZn
ZnDimethylzinc-triethylamine adductDMZn/TEA
ZnDitertiarybutylzincDTBZn
ZrTetrakis(ethylmethylamino)zirconium(IV)TEMAZr
ZrTris(dimethylamino)zirconiumTDMAZr

 

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