Precursors for deposition technologies (MOCVD, ALD...)

Precursors

We offer several grades of precursors for deposition technologies (MOCVD, ALD...), up to the highest standards (Epitaxy).

Dopant	Product name	Acronym
Al	Aluminumtrichloride	AlCl3
Al	Diethylaluminumethoxide	DEALO
Al	Diethylaluminumhydride	DEAlH
Al	Dimethylaluminium i-propoxide	DMAliP
Al	Dimethylaluminumhydride	DMAlH
Al	Dimethylethylaminealane-adduct	DMEAAl
Al	Triethylaluminum	TEAL
Al	Tritertiarybutylaluminum	TTBAL
As	Arsenictrichloride	AsCL3
As	Tertiarybutylarsine	TBAs
As	Triethoxyarsine	TEOAs
As	Trimethylarsine	TMAs
As	Tris(dimethylamino)arsine	TDMAAs
B	Borazine	Borazine
B	Triethylboron	TEB
B	Triethylboron B10	TEB (B10)
B	Tritertiarybutylboron	TTBB
B	Triethylboron	TEB
Bi	Trimethylbismuth	TMBi
Bi	Tritertiarybutylbismuth	TTBBi
Br	Carbontrichloridebromide	CCL3Br
Br	Carbontetrabromide	CBr4
C	Hexene	Hexene
C	Pentane	Pentane
Cd	Dimethylcadmium	DMCd
Cd	Dimethylcadmium in hexane	DMCd in Hexane 10% sol.
Cl	Tertiarybutylchloride	TBCL
Cr	Bis-Cyclopentadienyl-chromium	Cp2Cr
Fe	Ferrocene	Cp2Fe
Ga	Triethylgallium	TEGa
Ga	Trimethylgallium	TMGa
Ga	Tritertiarybutylgallium	TTBGa
Ge	Germaniumtetrachloride	GeCl4
Ge	Isobutylgermane	IBGe
Ge	Tetramethylgermane	TMGe
Hf	Tetrakis(dimethylamino)hafnium	TDMAHf
Hf	Tetrakis(ethylmethylamino)hafnium(IV)	TEMAHf
Hf	Tris(dimethylamino)cyclopentadienylhafnium	TDMACpHf
I	Ethyliodide	EI
I	Isobutyliodide	IBI
I	Methyliodide	MI
In	Cyclopentadienylindium	InCp
In	Dimethylaminopropyl-dimethyl-indium	DADI
In	Triethylindium	TEIn
In	Triisopropylindium	TIPIn
In	Trimethylindium	TMIn
In	Trimethylindium	TMIn
La	Tris(isopropylcyclopentadienyl)lanthanum	La(iPrCp)3
Mg	Bis(methylcyclopentadienyl)magnesium	MCp2Mg
Mg	Bis-Cyclopentadienyl-magnesium	Cp2Mg
Mn	Bis(methylcyclopentadienyl)manganese	(MCp)2Mn
Mn	Bis-Cyclopentadienyl-manganese	Cp2Mn
Mo	(Ethylcyclopentadienyl)dicarbonylnitrosylmolybdenum	ECpDCNMo
Mo	(Methylcyclopentadienyl)dicarbonylnitrosylmolybdenum	MCpDCNMo
Mo	Bis(tert-butylimido)bis(dimethylamido)molybdenum	TBDMAMo
Mo	Molybdenumhexacarbonyl	Mo(CO)6
N	Dimethylhydrazine	UDMHy
N	Tertiarybutylhydrazine	TBHy
N	Triethylamine	TEN
N	Trisilylamine	TSA
Nb	(tert-Butylimino)tris(diethylamino)niobium	TBTDANb
O	Water purified	H2O
P	Tertiarybutylphosphine	TBP
Pt	Trimethyl(methylcyclopentadienyl)platinum(IV)	MeCpPtMe3
Ru	Bis(ethylcyclopentadienyl)ruthenium(II)	Ru(EtCp)2
S	Diethylsulfide	DES
S	Ditertiarybutylsulfid	DTBS
Sb	Antimonytribromide	SbBr3
Sb	Triethylantimony	TESb
Sb	Trimethylantimony	TMSb
Sb	Tris(dimethylamino)antimony	TDMASb
Sc	Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)scandium(III)tetraglyme	Sc-MO-1
Sc	Tris(cyclopentadienyl)scandium	Cp3Sc
Sc	Tris(isopropylecyclopentdienyl)scandium	(iPCp)3Sc
Sc	Tris(methylcyclopentadienyl)scandium	(MCp)3Sc
Sc	Tris(N,N-diethylacetamidinate)scandium	TDEacaSc
Sc	Tris(N,N-diisopropylacetamidinate)scandium	TDiPacaSc
Se	Diethylselenide	DESe
Se	Diisopropylselenide	DiPSe
Se	Dimethylselenide	DMSe
Si	Bis(diethylamino)silane	BDEASi
Si	Bis(ethylmethylamino)silane	BEMASi
Si	Bis(tertiär-butylamino)silan	BTBASi
Si	Ditertiarybutylsilane	DTBSi
Si	Ditertiarybutylsilane	DTBSi
Si	Siliciumtetrachloride	SiCL4
Si	Tetraethylorthosilicate	TEOS
Si	Tetramethylsilane	TMSi
Si	Triethoxysilane	HTEOS
Si	Trimethoxypropylsilane	TMOPSi
Si	Tris(dimethylamino)silane	TDMASi
Sn	Tetraethyltin	TESn
Sn	Tetramethyltin	TMSn
Sn	Tintetrachloride	SnCL4
Ta	Pentakis(dimethylamino)tantalum(V)	PDMATa
Ta	Pentakis(ethoxy)tantalum	PETa
Ta	Tantalum(V)-ethoxide	TaEtO
Te	Diethyltelluride	DETe
Te	Diisopropyltelluride	DiPTe
Te	Ditertiarybutyltelluride	DTBTe
Te	Methylallyltelluride	MATe
Ti	Tetraisopropoxytitanium	TiPOTi
Ti	Tetrakis(dimethylamino)titanium(IV)	TDMAT
Ti	Titaniumtetrachloride	TiCL4
Ti	Titaniumtetraisopropoxide	TTIP
V	Bis-cyclopentadienyl-vanadium	Cp2V
V	Vanadiumtetrachloride	VCl4
W	(Ethylcyclopentadienyl)dicarbonylnitrosyltungsten	ECpDCNW
W	(Methylcyclopentadienyl)dicarbonylnitrosyltungsten	MCpDCNW
W	Bis(tert-butylimido)bis(dimethylamido)tungsten	TBDMAW
W	Tungstenhexacarbonyl	W(CO)6
Zn	Diethylzinc	DEZn
Zn	Dimethylzinc	DMZn
Zn	Dimethylzinc-triethylamine adduct	DMZn/TEA
Zn	Ditertiarybutylzinc	DTBZn
Zr	Tetrakis(ethylmethylamino)zirconium(IV)	TEMAZr
Zr	Tris(dimethylamino)zirconium	TDMAZr